Control of a 5DOF magnetically levitated positioning stage

IEEE Transactions on Control Systems Technology

Volumn 17, Issue 4, 2009, Pages 844-852

  Fulford, Cameron ^a,b   Maggiore, Manfredi ^a   Apkarian, Jacob ^b  

^a UNIVERSITY OF TORONTO   (Canada)

^b Quanser Consulting Inc   (Canada)

Author keywords

Five degrees of freedom (5DOF) motion control; Internal model regulation; Magnetic levitation; Nonlinear control; Permanent magnet linear synchronous motor (PMLSM); Positioning stage; Tracking

Indexed keywords

FIVE DEGREES-OF-FREEDOM (5DOF) MOTION CONTROL; INTERNAL MODEL REGULATION; NONLINEAR CONTROL; PERMANENT MAGNET LINEAR SYNCHRONOUS MOTOR (PMLSM); POSITIONING STAGE; TRACKING;

ELECTRIC MOTORS; FEEDBACK LINEARIZATION; MAGNETIC DEVICES; MAGNETIC LEVITATION; MAGNETIC LEVITATION VEHICLES; MATHEMATICAL MODELS; MOTION CONTROL; MOTION PLANNING; PERMANENT MAGNETS;

SYNCHRONOUS MOTORS;

EID: 67650708304     PISSN: 10636536     EISSN: None     Source Type: Journal    
DOI: 10.1109/TCST.2008.2002755     Document Type: Article

References (16)

1. W. Kim and D. L. Trumper, "High-precision levitation stage for photolithography," Precision Eng., vol. 22, pp. 66-77, 1998.
2. W. Kim, D. L. Trumper, and J. H. Lang, "Modeling and vector control of planar magnetic levitator," IEEE Trans. Ind. Appl., vol. 34, no. 6, pp. 1254-1262, Nov./Dec. 1998.
3. S. Verma, W.-J. Kim, and H. Shakir, "Multi-axis maglev nanopositioner for precision manufacturing and manipulation applications," IEEE Trans. Ind. Appl., vol. 41, no. 5, pp. 1159-1167, Sep./Oct. 2005.
4. S. Verma, W.-J. Kim, and J. Gu, "Six-axis nanopositioning device with precision magnetic levitation technology," IEEE/ASME Trans. Mechatron., vol. 9, no. 2, pp. 384-391, Mar. 2004.
5. J. Gu, W.-J. Kim, and S. Verma, "Nanoscale motion control with a compact minimum-actuator magnetic levitator," J. Dyn. Syst., Meas., Control, vol. 127, pp. 433-442, 2005.
6. X. Shan, S.-K. Kuo, J. Zhang, and C.-H. Menq, "Ultra precision motion control of a multiple degree of freedom magnetic suspension stage," IEEE/ASME Trans. Mechatron., vol. 7, no. 1, pp. 67-78, Mar. 2002.
7. S.-K. Kuo, X. Shan, and C.-H. Menq, "Large travel ultra precision x - y - θ motion control of a magnetic suspension stage," IEEE/ASME Trans. Mechatron., vol. 8, no. 3, pp. 334-341, May 2003.
8. S.-K. Kuo and C.-H. Menq, "Modeling and control of a six-axis precision motion control stage," IEEE/ASME Trans. Mechatron., vol. 10, no. 1, pp. 50-59, Jan. 2005.
9. Z. Zhang and C.-H. Menq, "Six-axis magnetic levitation and motion control," IEEE Trans. Robot., vol. 23, no. 2, pp. 196-205, Apr. 2007.
10. M. Maggiore and R. Becerril, "Modeling and control design for a magnetic levitation system," Int. J. Control, vol. 77, no. 10, pp. 964-977, 2004.
11. R. B. Owen and M. Maggiore, "A high-precision, magnetically levitated positioning stage: Toward contactless actuation for industrial manufacturing," Control Syst. Mag., vol. 26, no. 3, pp. 82-95, 2006.
12. R.B. Owen and M. Maggiore, "Implementation and model verification of a magnetic levitation system," in Proc. Amer. Control Conf., Portland, OR, 2005, pp. 1142-1147.
13. C. Fulford, "Control of a high-precision positioning system using magnetic levitaion," Master's dissertation, Univ. Toronto, Toronto, ON, Canada, 2007.
14. E. J. Davison, "The robust control of a servomechanism problem for linear time-invariant multivariable systems," IEEE Trans. Autom. Control, vol. 21, no. 1, pp. 25-34, Feb. 1976.
15. B. A. Francis, "The linear multivariable regulator problem," SIAM J. Control Opt., vol. 14, pp. 486-505, 1977.
16. B. A. Francis and W. M. Wonham, "The internal model principle of control theory," Automatica, vol. 12, pp. 457-465, 1976.