Large travel ultra precision x - y θ motion control of a magnetic-suspension stage

IEEE/ASME Transactions on Mechatronics

Volumn 8, Issue 3, 2003, Pages 334-341

  Kuo, Shih Kang ^a   Shan, Ximin ^a,b   Menq, Chia Hsiang ^a  

^a Ohio State University   (United States)

^b Corning Inc ^*  (United States)

Author keywords

Adaptive control; Magnetic suspension system; Motion control; System identification

Indexed keywords

CLOSED LOOP CONTROL SYSTEMS; CONTROL SYSTEM SYNTHESIS; DEGREES OF FREEDOM (MECHANICS); ELECTROMAGNETS; FEEDBACK CONTROL; IDENTIFICATION (CONTROL SYSTEMS); LINEARIZATION; MAGNETIC LEVITATION; MOTION CONTROL; PRECISION ENGINEERING;

FEEDBACK LINEARIZATION; MAGNETIC SUSPENSION SYSTEM;

ADAPTIVE CONTROL SYSTEMS;

EID: 0141975339     PISSN: 10834435     EISSN: None     Source Type: Journal    
DOI: 10.1109/TMECH.2003.816825     Document Type: Article

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