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Volumn 2, Issue , 2005, Pages 1142-1147

Implementation and model verification of a magnetic levitation system

Author keywords

[No Author keywords available]

Indexed keywords

CALIBRATION; CONTROL EQUIPMENT; DEGREES OF FREEDOM (MECHANICS); LINEAR MOTORS; MATHEMATICAL MODELS; NONLINEAR CONTROL SYSTEMS; PERMANENT MAGNETS; SYNCHRONOUS MOTORS;

EID: 23944437445     PISSN: 07431619     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper
Times cited : (7)

References (5)
  • 1
    • 0033282440 scopus 로고    scopus 로고
    • Servo system design of a high-resolution piezo-driven fine stage for step-and-repeat microlithography systems
    • K.-Y. Tsai and J.-Y. Yen, "Servo system design of a high-resolution piezo-driven fine stage for step-and-repeat microlithography systems," in The 25th Annual Conference of the IEEE Industrial Electonics Society, vol. 1, 1999, pp. 11-16.
    • (1999) The 25th Annual Conference of the IEEE Industrial Electonics Society , vol.1 , pp. 11-16
    • Tsai, K.-Y.1    Yen, J.-Y.2
  • 2
    • 0032041169 scopus 로고    scopus 로고
    • High-precision levitation stage for photolithography
    • W. Kim and D. Trumper, "High-precision levitation stage for photolithography," Precision Engineering, vol. 22, pp. 66-67, 1998.
    • (1998) Precision Engineering , vol.22 , pp. 66-67
    • Kim, W.1    Trumper, D.2
  • 3
    • 5044241151 scopus 로고    scopus 로고
    • Modeling and control design for a magnetic levitation system
    • M. Maggiore and R. Becerril, "Modeling and control design for a magnetic levitation system," International Journal of Control, vol. 77, no. 10, pp. 964-977, 2004.
    • (2004) International Journal of Control , vol.77 , Issue.10 , pp. 964-977
    • Maggiore, M.1    Becerril, R.2
  • 5
    • 0033351670 scopus 로고    scopus 로고
    • Reduction of cogging forces in linear synchronous motors
    • R. Cruise and C. Landy, "Reduction of cogging forces in linear synchronous motors," in IEEE African 1999, vol. 2, 1999, pp. 623-626.
    • (1999) IEEE African 1999 , vol.2 , pp. 623-626
    • Cruise, R.1    Landy, C.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.