Microwave-frequency effects on microplasma

IEEE Transactions on Plasma Science

Volumn 37, Issue 6 PART 1, 2009, Pages 816-822

  Xue, Jun ^a   Hopwood, Jeffrey A ^a  

^a Tufts University   (United States)

Author keywords

Microplasma; Microwave plasma; Plasma impedance; Plasma simulation

Indexed keywords

1.8 GHZ; 900 MHZ; BULK PLASMA; CAPACITIVELY COUPLED; DRIVING FREQUENCIES; ELECTRICAL IMPEDANCE; ELECTRODE VOLTAGE; ELECTRON DENSITIES; EXCITATION FREQUENCY; FREE ELECTRON; FUNCTION OF FREQUENCY; HIGHER FREQUENCIES; ION KINETIC ENERGY; MICRO-PLASMAS; MICROPLASMA; MICROWAVE PLASMA; MICROWAVE POWER; PLASMA IMPEDANCE; PLASMA POTENTIAL; POWER REFLECTION COEFFICIENT; REACTIVE IMPEDANCE; TWO PARAMETER;

ARGON; ATMOSPHERIC PRESSURE; ELECTRIC POTENTIAL; ELECTRON ENERGY LOSS SPECTROSCOPY; ENERGY DISSIPATION; HELIUM; MICROWAVE FREQUENCIES; PLASMA DEVICES; PLASMA DISPLAY DEVICES; PLASMA SIMULATION;

PLASMA DIAGNOSTICS;

EID: 67650334393     PISSN: 00933813     EISSN: None     Source Type: Journal    
DOI: 10.1109/TPS.2009.2015453     Document Type: Article

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