Microplasma trapping of particles

IEEE Transactions on Plasma Science

Volumn 35, Issue 5 II, 2007, Pages 1574-1579

  Xue, Jun ^a   Hopwood, Jeffrey A ^a  

^a TUFTS UNIVERSITY   (United States)

Author keywords

Dusty plasma; Microparticle; Microplasma

Indexed keywords

COULOMB INTERACTIONS; DRAG; ELECTRONS; ELECTROSTATIC DISCHARGE;

COULOMB CRYSTALS; MICROPLASMA; MOLECULAR DRAG FORCE;

CHARGE TRAPPING;

EID: 35348958022     PISSN: 00933813     EISSN: None     Source Type: Journal    
DOI: 10.1109/TPS.2007.905210     Document Type: Article

References (20)

1. B. Y. H. Liu and D. Y. H. Pui, "Equilibrium bipolar charge distribution of aerosols," J. Colloid Interface Sci., vol. 49, no. 2, pp. 305-312, 1974.
2. A. Wiedensohler, E. Lütkemeier, M. Feldpausch, and C. Helsper, "Investigation of the bipolar charge distribution at various gas conditions," J. Aerosol Sci., vol. 17, no. 3, pp. 413-416, 1986.
3. G. Praburam and J. Goree, "Observations of particle layers levitated in an rf sputtering plasma," J. Vac. Sci. Technol. A, Vac. Surf. Films vol. 12, no. 6, pp. 3137-3145, Nov. 1994.
4. G. S. Selwyn, J. Singh, and R. S. Bennett, "In situ laser diagnostic studies of plasma-generated particulate contamination," J. Vac. Sci. Technol. A, Vac. Surf. Films, vol. 7, no. 4, pp. 2758-2765, Jul. 1989.
5. E. Whipple, "Potentials of surfaces in space," Rep. Prog. Phys., vol. 44, no. 11, pp. 1197-1250, Nov. 1981.
6. J. Goree, "Charging of particles in a plasma," Plasma Sources Sci. Technol., vol. 3, no. 3, pp. 400-406, Aug. 1994.
7. S. J. Choi and M. J. Kushner, "A particle-in-cell simulation of dust charging and shielding in low pressure glow discharges," IEEE Trans. Plasma Sci., vol. 22, no. 2, pp. 138-150, Apr. 1994.
8. M. S. Barnes, J. H. Keller, J. C. Forster, J. A. O'Neill, and D. K. Coultas, "Transport of dust particles in glow-discharge plasmas," Phys. Rev. Lett., vol. 68, no. 3, pp. 313-316, Jan. 1992.
9. K. Ostrikov and L. Stenflo, "On equilibrium states and dust charging in dusty plasmas," IEEE Trans. Plasma Sci., vol. 29, no. 2, pp. 175-178, Apr. 2001.
10. P. K. Shukla, D. Mendis, and V. W. Chow, The Frontiers of Dusty Plasmas. Singapore: World Scientific, 1996.
11. V. Karanassios, "Microplasmas for chemical analysis: Analytical tools or research toys?," Spectrochim. Acta B, At. Spectrosc., vol. 59, no. 7, pp. 909-928, Jul. 2004.
12. R. M. Sankaran, D. Holunga, R. C. Flagan, and K. P. Giapis, "Synthesis of blue luminescent Si nanoparticles using atmospheric-pressure microdischarges," Nano Lett., vol. 5, no. 3, pp. 537-541, 2005.
13. J. Hopwood, F. Iza, S. Coy, and D. Fenner, "A microfabricated atmospheric-pressure microplasma source operating in air," J. Phys. D, Appl. Phys., vol. 38, no. 11, pp. 1698-1703, Jun. 2005.
14. C. Cui and J. Goree, "Huctuations of the charge on a dust grain in a plasma," IEEE Trans. Plasma Sci., vol. 22, no. 2, pp. 151-158, Apr. 1994.
15. M. A. Lieberman and A. J. Lichtenberg, Principles of Plasma Discharges and Materials Processing, 2nd ed. Hoboken, NJ: Wiley, 2005, p. 167.
16. J. F. O'Hanlon, J. Kang, L. K. Russell, and L. Hong, "The effects of electrostatic, molecular drag, and gravitational forces on the behavior of particle clouds in an RF discharge," IEEE Trans. Plasma Sci., vol. 22, no. 2, pp. 122-127, Apr. 1994.
17. G. A. Hebner, M. E. Riley, D. S. Johnson, P. Ho, and R. J. Buss, "Direct determination of particle-particle interactions in a 2D plasma dust crystal," Phys. Rev. Lett., vol. 87, no. 23, p. 235001-1, Dec. 2001.
18. V. Vyas, G. A. Hebner, and M. J. Kushner, "Self-consistent three-dimensional model of dust particle transport and formation of Coulomb crystals in plasma processing reactors," J. Appl. Phys., vol. 92, no. 11, pp. 6451-6460, Dec. 2002.
19. F. Iza, "Design, fabrication, and modeling of microfabricated inductively coupled plasma sources," M.S. thesis, Northeastern Univ., Boston, MA, 2000.
20. M. A. Lieberman and A. J. Lichtenberg, Principles of Plasma Discharges and Materials Processing, 2nd ed. Hoboken, NJ: Wiley, 2005, p. 184.