Reversible orientation-biased grain growth in thin metal films induced by a focused ion beam

Scripta Materialia

Volumn 53, Issue 11, 2005, Pages 1291-1296

  Spolenak, R ^a,c   Sauter, L ^a   Eberl, C ^b  

^a MAX PLANCK INSTITUTE FOR INTELLIGENT SYSTEMS   (Germany)

^b UNIVERSITY OF STUTTGART   (Germany)

^c ETH ZURICH   (Switzerland)

Author keywords

Channeling; Focused ion beam (FIB); Grain growth; Implantation; Thin films

Indexed keywords

CRYSTALS; GRAIN GROWTH; METALLIC FILMS;

GRAIN-BOUNDARY MOBILITY; THERMAL SPIKES;

THIN FILMS;

EID: 24944433462     PISSN: 13596462     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.scriptamat.2005.07.030     Document Type: Article

References (18)

1. R.M. Bradley, J.M.E. Harper, and D.A. Smith J Appl Phys 60 1986 4160
2. H.A. Atwater, C.V. Thompson, and H.I. Smith J Appl Phys 64 1988 2337
3. H.A. Atwater, C.V. Thompson, and H.I. Smith Phys Rev Lett 60 1988 112
4. G. Carter Phys Rev B: Condens Matter 62 2000 8376
5. L. Dong, and D.J. Srolovitz J Appl Phys 84 1998 5261
6. L. Dong, and D.J. Srolovitz Appl Phys Lett 75 1999 584
7. G.N. van Wyk, and H.J. Smith Nucl Instrum Methods 170 1980 433
8. D.E. Alexander, G.S. Was, and L.E. Rehn J Appl Phys 70 1991 1252
9. D.E. Alexander, and G.S. Was Phys Rev B: Condens Matter 47 1993 2983
10. J.R. Groves, P.N. Arendt, S.R. Foltyn, Q.X. Jia, T.G. Holesinger, and H. Kung J Mater Res 16 2001 2175
11. J. Li, J.C. Liu, and J.W. Mayer Nucl Instrum Methods Phys Res, Sect B 36 1989 306
12. J.C. Liu, L. Jian, and J.W. Mayer J Appl Phys 67 1990 2354
13. D.L. Barr, and W.L. Brown J Vacuum Sci Technol B 13 1995 2580
14. T. Ishitani, and H. Kaga J Electron Microsc 44 1995 331
15. J.F. Ziegler, J.P. Biersack, and U. Littmark The stopping range of ions in solids 1984 Pergamon Press New York
16. E. Friedland, N.G. van der Berg, O. Meyer, and S. Kalbitzer Nucl Instrum Methods Phys Res, Sect B 118 1996 29
17. E. Friedland, N.G. van der Berg, J. Hanssmann, and O. Meyer Surf Coat Technol 83 1996 10
18. L. Dong, D.J. Srolovitz, G.S. Was, Q. Zhao, and A.D. Rollett J Mater Res 16 2001 210