Practical considerations for measurements of test structures for dielectric characterization

IEEE International Conference on Microelectronic Test Structures

Volumn , Issue , 2009, Pages 221-225

  Chen, Wenbin ^a   McCarthy, Kevin G ^a   Mathewson, Alan ^a  

^a UNIVERSITY COLLEGE CORK   (Ireland)

Author keywords

[No Author keywords available]

Indexed keywords

C-V MEASUREMENT; CAPACITANCE VOLTAGE MEASUREMENTS; COMPLEX CROSS-SECTIONS; COMPLEX PERMITTIVITY; DIELECTRIC CHARACTERIZATION; DIELECTRIC CONSTANTS; S PARAMETERS; S-PARAMETER MEASUREMENTS; TEST STRUCTURE; TRANSMISSION LINE;

CAPACITANCE; ELECTRIC POTENTIAL; PERMITTIVITY; SCATTERING PARAMETERS; TESTING;

DIELECTRIC MATERIALS;

EID: 67650131815     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICMTS.2009.4814646     Document Type: Conference Paper

References (6)

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2. Z. Ma, A.J. Becker, "RF measurement technique of characterizing thin dielectric films," IEEE Transaction on Microwave Theory and Techniques, Vol. 45, no. 8, pp. 1811-1816, August 1998. (Pubitemid 128737840)
3. M. P.J. Tiggelman, K. Reimann, J. Liu, M. Klee, W. Keur, R. Mauczock, J. Schmitz, and R. J.E. Hueting, "Identifying dielectric and resistive electrode losses in high-density capacitors at radio frequencies," Proceeding of the 2008 IEEE International Conference on Microelectronic Test Structures, ICMTS, Vol. 8, pp. 190-195, Edinburgh, 24-27 March 2008.
4. D. MacSweeney, K.G. McCarthy, L. Floyd, A. Mathewson, P. Hurley, J.A. Power, S.C. Kelly, "Influence of probing configuration and data set size for bipolar junction capacitance determination," Proceeding of the 2002 IEEE International Conference on Microelectronic Test Structures, ICMTS, Vol. 15, pp. 127-132, Cork, 8-11 April 2002.
5. Y. Okawal, H. Norimatsul, H. Suto, M. Takayanag, "The negative capacitance effect on the C-V measurement of ultra thin gate dielectrics induced by the stray caoacitance of the measurement system," Proceeding of the 2003 IEEE International Conference on Microelectronic Test Structures, ICMTS, pp. 197-202, Monterey, 17-20 March 2003.
6. W. Chen, J.A. O'Sullivan and K.G. McCarthy,"Dielectric characterization for novel high-k thin films using microwave techniques," Proceeding of IET China-Ireland International Conference on Information and Communications Technologies, CIICT, pp. 29-36, Beijing, 26-28 September 2008.