Advanced test structure design for dielectric characterisation of novel high-K materials

IEEE International Conference on Microelectronic Test Structures

Volumn , Issue , 2008, Pages 180-184

  O'Sullivan, John A ^a   Chen, Wenbin ^b   McCarthy, Kevin G ^a   Crean, Gabriel M ^b  

^a UNIVERSITY COLLEGE CORK   (Ireland)

^b UNIVERSITY COLLEGE CORK   (Ireland)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER NETWORKS; LEAD; NIOBIUM;

CAPACITOR DESIGN; HIGH-K MATERIALS; TEST STRUCTURES;

DIELECTRIC MATERIALS;

EID: 51349163645     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICMTS.2008.4509335     Document Type: Conference Paper

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