Dielectric characterization for novel high-k thin films using microwave techniques

IET Conference Publications

Volumn , Issue 544 CP, 2008, Pages 631-634

  Chen, Wenbin ^a   O'Sullivan, J A ^b   McCarthy, K G ^b  

^a UNIVERSITY COLLEGE CORK   (Ireland)

^b UNIVERSITY COLLEGE CORK   (Ireland)

Author keywords

Coplanar waveguide (CPW); Dielectric characterization; Microwave measurements; Thin film

Indexed keywords

ALUMINA SUBSTRATES; CHARACTERISTIC IMPEDANCE; COPLANAR WAVEGUIDE (CPW); DIELECTRIC CHARACTERIZATION; DIELECTRIC CONSTANTS; EFFECTIVE DIELECTRIC CONSTANTS; ELECTROMAGNETIC SIMULATION; EM SIMULATIONS; EXTRACTION TECHNIQUES; HIGH-K MATERIALS; IMPEDANCE STANDARDS; MICROWAVE TECHNIQUE; PROBE MEASUREMENTS; S-PARAMETER MEASUREMENTS; THIN-FILM CHARACTERIZATION;

CERAMIC CAPACITORS; DIELECTRIC WAVEGUIDES; MICROWAVE MEASUREMENT; MICROWAVES; PERMITTIVITY; SUBSTRATES; THIN FILM DEVICES; THIN FILMS;

COPLANAR WAVEGUIDES;

EID: 67649981157     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1049/cp:20080884     Document Type: Conference Paper

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