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dov = λsub cosθln (Dsub Iov Dov Isub +1) where λsub is the electron mean-free path, θ is the electron emission angle from the surface normal, Iov and Isub are the XPS peak intensities of overlayer (oxide) and substrate level, and Dov and Dsub are the atomic densities of the element in overlayer and substrate in mol/ cm3.
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