A cmos mems thermal sensor with high frequency output

Proceedings of IEEE Sensors

Volumn , Issue , 2008, Pages 387-390

  Tseng, S H ^a,b   Fang, C L ^b   Wu, P C ^b   Juang, Y Z ^b   Lu, M S C ^a  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

^b NATIONAL APPLIED RESEARCH LABORATORIES   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

CMOS-MEMS; HIGH FREQUENCY HF; HIGH FREQUENCY OUTPUT; TEMPERATURE SENSITIVITY; THERMAL SENSORS; THERMOELECTRIC VOLTAGE;

POLYSILICON;

SENSORS;

EID: 67649947127     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICSENS.2008.4716460     Document Type: Conference Paper

References (10)

1. D. Goustouridias, G. Kaltsas, A. G. Nassiopoulou, "A silicon thermal accelerometer without solid proof mass using porous silicon thermal isolation," IEEE Journal of Sensors, vol.7, no. 7, 2007, pp. 983-989.. (Pubitemid 46685700)
2. S. H. Tsang, A. H. Ma, K. S. Karim, A. Parameswaran, and A. M. Leung, "Monolithically fabricated polymermems 3-axis thermal accelerometers design for automated wirebonder assembly," IEEE MEMS Conf., 2008, pp. 880-883.
3. A. Schaufelbuhl, N. Schneeberger, U. Munch, M. Waelti, O. Paul, O. Brand, H. Baltes, C. Menolfi, Q. Huang, E. Doering, M. Loepfe, "Uncooled low-cost thermal imager based on micromachined CMOS integrated sensor array," IEEE J. Microelectromechanical Systems, vol.10, no. 40, 2001, pp. 503-510. (Pubitemid 34000316)
4. H. Baltes, and O. Brand, "CMOS-based microsensors and packaging," Sensors and Actuators A, vol.92, 2001, pp. 1-9.
5. C. Menolfi, and Q. Huang, "A low-noise CMOS instrumentation amplifier for thermoelectric infrared detectors," IEEE J. Solid-State Circuits, vol.32, no. 7, 1997, pp. 968-976. (Pubitemid 127580553)
6. U. Munch, D. Jaeggi, K. Schneeberger, A. Schaufelbuhl, O. Paul, H. Baltes, and J. Jasper, "Inductrial fabrication technology for CMOS infrared sensor arrays," Transducers Conf., pp. 205-208, 1997.
7. T. Akin, Z. Olgun, O. Akar, H. Kulah, " An integrated thermopile structure with high responsivity using any standard CMOS process," Sensors and Actuators A, vol.66, 1998, pp.218-224. (Pubitemid 128378834)
8. S. H. Tseng, Y. J Huang, Y. Z. Juang, and M. S.-C. Lu, "A 5.8-GHz VCO with CMOS-compatible MEMS inductors," Sensors and Actuators A, vol.139, 2007, pp. 187-193. (Pubitemid 47321870)
9. S. M. Sze, Semiconductor Sensors, John Wiley and Sons, New York, 1994.
10. A. Hajimiri, T.-H. Lee, Low Noise Oscillators, Kluwer Academic Publishers, Boston, 1999.