Monolithically fabricated polymermems 3-axis thermal accelerometers designed for automated wirebonder assembly

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2008, Pages 880-883

  Tsang, See Ho ^a   Ma, Abdul Haseeb ^a   Karim, Karim S ^a   Parameswaran, Ash ^a   Leung, Albert M ^a  

^a SIMON FRASER UNIVERSITY   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

COMPOSITE MICROMECHANICS; MECHANICAL ENGINEERING; MECHANICS; MECHATRONICS; MEMS; MICROELECTROMECHANICAL DEVICES; OPTICAL DESIGN; PHOTORESISTS; POLYMERS; REACTIVE ION ETCHING; STANDARDS;

DC SENSITIVITY; INTERNATIONAL CONFERENCES; MECHANICAL STRUCTURES; MICRO-ELECTRO MECHANICAL SYSTEMS; OUT-OF PLANE; POLY IMIDE; WIRE BONDERS;

ACCELEROMETERS;

EID: 50149103561     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2008.4443797     Document Type: Conference Paper

References (8)

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