Processing of micro-components made of sintered reaction-bonded silicon nitride (SRBSN). Part 1: Factors influencing the reaction-bonding process

Ceramics International

Volumn 35, Issue 7, 2009, Pages 2577-2585

  Müller, Marcus ^a   Bauer, Werner ^a   Knitter, Regina ^a  

^a KARLSRUHE INSTITUTE OF TECHNOLOGY   (Germany)

Author keywords

A. Injection moulding; D. Si3N4; Micro components; Reaction bonding

Indexed keywords

A. INJECTION MOULDING; D. SI3N4; GREEN BODY; MGO CONTENT; MICRO-COMPONENTS; PROCESS PARAMETERS; REACTION-BONDED SILICON NITRIDES; REACTION-BONDING; SAMPLE SIZES; SINTERING AID; SMALL SAMPLES; SURFACE-TO-VOLUME RATIO; THERMAL EQUILIBRIUMS; WALL THICKNESS;

BONDING; INJECTION MOLDING; NITRIDATION; SILICON NITRIDE; SINTERING;

SILICON;

EID: 67649637262     PISSN: 02728842     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ceramint.2009.02.013     Document Type: Article

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