Catalytic Effects of Metals on Direct Nitridation of Silicon

Journal of the American Ceramic Society

Volumn 84, Issue 8, 2001, Pages 1669-1674

  Pavarajarn, Varong ^a,b   Kimura, Shoichi ^a  

^a Oregon State University   (United States)

^b OREGON STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ADDITION REACTIONS; IMPREGNATION; PHASE TRANSITIONS; SILICON; SILICON NITRIDE; TEMPERATURE;

CATALYTIC EFFECTS; DIRECT NITRIDATION; TUBULA FLOW REACTOR;

CATALYSIS;

EID: 0035437566     PISSN: 00027820     EISSN: None     Source Type: Journal    
DOI: 10.1111/j.1151-2916.2001.tb00897.x     Document Type: Article

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