A cyclic process for the nitridation of Si powder

Materials Science and Engineering: A

Volumn 408, Issue 1-2, 2005, Pages 85-91

  Kim, MinKee ^a   Park, JongKu ^b   Lee, Hae Weon ^b   Kang, Shinhoo ^a  

^a Seoul National University   (South Korea)

^b Korea Institute of Science and Technology   (South Korea)

Author keywords

Cyclic reaction; Internal stress; Si3N4; Stress intensity factor

Indexed keywords

CHEMICAL BONDS; CRACK INITIATION; HEATING; INJECTION MOLDING; ISOTHERMS; NITRIDING; POWDERS; RESIDUAL STRESSES; STRESS INTENSITY FACTORS; THERMAL CYCLING; TRANSMISSION ELECTRON MICROSCOPY; UTILITY RATES;

CYCLIC REACTION; ISOTHERMAL HEATING PROCESSES; NITRIDATION METHOD; REACTION-BONDED SILICON NITRIDE (RBSN);

SILICON NITRIDE;

SILICON;

EID: 27944438803     PISSN: 09215093     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.msea.2005.08.061     Document Type: Article

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