Construction of a measurement and control system for a sawyer motor-driven planar motion stage

Nami Jishu yu Jingmi Gongcheng/Nanotechnology and Precision Engineering

Volumn 4, Issue 3, 2006, Pages 182-189

  Tano, M ^a   Gao, Wei ^a   Dian, S Y ^a   Kiyono, S ^a   Tomita, Y ^b   Makino, K ^b   Motita, H ^b  

^a TOHOKU UNIVERSITY   (Japan)

^b SUMITOMO HEAVY INDUSTRIES LTD   (Japan)

Author keywords

Control; Measurement; Positioning; Sawyer motor; Sensor; Sine grid; Surface encoder

Indexed keywords

POSITIONING; PRECISION POSITIONING SYSTEM; SAWYER MOTOR DRIVEN STAGE; SINE GRID; SURFACE ENCODER;

DRIVES; ELECTRIC MOTORS; EQUIPMENT; FEEDBACK CONTROL; MEASUREMENTS; POSITION CONTROL; POSITION MEASUREMENT; SEMICONDUCTOR DEVICE MANUFACTURE; SENSORS;

CONTROL SYSTEMS;

EID: 33750579036     PISSN: 16726030     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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