3-DOF closed-loop control for planar linear motors

Proceedings - IEEE International Conference on Robotics and Automation

Volumn 3, Issue , 1998, Pages 2488-2493

  Quaid, Arthur E ^a   Hollis, Ralph L ^a  

^a CARNEGIE MELLON UNIVERSITY   (United States)

Author keywords

Actuators; Commutation; Control systems; Electrical equipment industry; Force control; Open loop systems; Planar motors; Robustness; Three term control; Velocity control

Indexed keywords

ACTUATORS; CONTROL SYSTEMS; CONTROLLERS; ELECTRIC COMMUTATION; ELECTRIC CONTROL EQUIPMENT; FORCE CONTROL; INTERFEROMETERS; LASER INTERFEROMETRY; PROPORTIONAL CONTROL SYSTEMS; ROBOTICS; ROBUSTNESS (CONTROL SYSTEMS); STEPPING MOTORS; THREE TERM CONTROL SYSTEMS; VELOCITY CONTROL; CLOSED LOOP CONTROL SYSTEMS; COMPUTER SOFTWARE; DEGREES OF FREEDOM (MECHANICS); ELECTRIC COMMUTATORS; ELECTRIC CURRENTS; LASER APPLICATIONS; SENSORS;

ELECTRICAL EQUIPMENT; LASER INTERFEROMETER; OPEN LOOP SYSTEMS; PLANAR MOTORS; REDUNDANT ACTUATION; SATURATION PROBLEMS; SUB-MICRON RESOLUTIONS; THREE-TERM;

LINEAR MOTORS;

LASER INTERFEROMETERS;

EID: 0031621501     PISSN: 10504729     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ROBOT.1998.680715     Document Type: Conference Paper

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