Fabrication of SHF range SAW devices on AINlDiamond-substrate

Proceedings - IEEE Ultrasonics Symposium

Volumn , Issue , 2008, Pages 196-200

  Omori, Tatsuya ^a   Kobayashi, Atsushi ^a   Takagi, Yuya ^a   Hashimoto, Ken Ya ^a   Yamaguchi, Masatsune ^a  

^a CHIBA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

AIN FILMS; AIN THIN FILMS; CAPACITANCE RATIO; DIAMOND SUBSTRATES; GRATING ELECTRODES; HIGH Q FACTOR; ONE-PORT RESONATORS; OPTIMISATION; POLYCRYSTALLINE DIAMONDS; Q-FACTOR; SAW DEVICE; SUBSTRATE STRUCTURE; THICK ELECTRODES; TRANSVERSAL FILTERS;

ACOUSTIC SURFACE WAVE FILTERS; DIAMOND FILMS; DIAMONDS; ELECTRIC FILTERS; ELECTRODES; FABRICATION; FILM PREPARATION; Q FACTOR MEASUREMENT; RESONATORS;

SUBSTRATES;

EID: 67649347959     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ULTSYM.2008.0048     Document Type: Conference Paper

References (8)

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