Simple fabrication of metal-based piezoelectric MEMS by direct deposition of Pb(Zr,Ti) O3 thin films on titanium substrates

Journal of Microelectromechanical Systems

Volumn 18, Issue 3, 2009, Pages 610-615

  Kanda, Kanda ^a   Kanno, Isaku ^b   Kotera, Hidetoshi ^b   Wasa, Kiyotaka ^b  

^a UNIVERSITY OF HYOGO   (Japan)

^b KYOTO UNIVERSITY   (Japan)

Author keywords

Actuators; Arrays; Microactuators; Pb (Zr, Ti) O3 (PZT) ceramics; Piezoelectricity; Resonant frequency; Silicon; Sputtering; Substrates; Thin film devices; Titanium

Indexed keywords

ACTUATOR PERFORMANCE; ARRAYS; DIRECT DEPOSITION; ELASTIC COMPLIANCE; PB (ZR, TI) O3 (PZT) CERAMICS; PB(ZR ,TI)O; PIEZOELECTRIC COEFFICIENT; PIEZOELECTRIC MEMS; PIEZOELECTRIC PROPERTY; POLYCRYSTALLINE PEROVSKITE; PZT; PZT FILM; PZT THIN FILM; RANDOM ORIENTATIONS; RESONANCE MODE; RESONANT FREQUENCIES; RESONANT FREQUENCY; SCANNING ELECTRON MICROSCOPES; SENSORS AND ACTUATORS; THEORETICAL EQUATION; THERMAL EXPANSION COEFFICIENTS; TI SUBSTRATES; TIP DISPLACEMENT; TITANIUM SUBSTRATES; UNIMORPH; UNIMORPH ACTUATORS; X-RAY DIFFRACTION MEASUREMENTS;

ATOMIC FORCE MICROSCOPY; CERAMIC MATERIALS; CRYSTALLOGRAPHY; ELECTRIC FIELDS; LEAD; LEAD ALLOYS; MICROACTUATORS; NANOCANTILEVERS; NATURAL FREQUENCIES; OXIDE MINERALS; PEROVSKITE; PIEZOELECTRIC ACTUATORS; PIEZOELECTRIC MATERIALS; PIEZOELECTRIC TRANSDUCERS; PIEZOELECTRICITY; PLATINUM; PYROELECTRICITY; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTING LEAD COMPOUNDS; STAINLESS STEEL; THERMAL EXPANSION; THIN FILM DEVICES; THIN FILMS; TITANIUM; ZIRCONIUM;

SUBSTRATES;

EID: 67549140142     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2009.2015478     Document Type: Article

References (22)

1. E.-H. Yang, Y. Hishinuma, J.-G. Cheng, S. Trolier-McKinstry, E. Bloemhof, and B. M. Levine, "Thin-film piezoelectric unimorph actuator-based deformable mirror with a transferred silicon membrane," J. Microelectromech. Syst., vol. 15, no. 5, pp. 1214-1225, Oct. 2006.
2. P. Muralt, A. Kholkin, M. Kohli, and T. Maeder, "Piezoelectric actuation of PZT thin-film diaphragms at static and resonant conditions," Sens. Actuators A, Phys., vol. 53, no. 1, pp. 398-404, May 1996.
3. J. H. Lee, K. H. Yoon, K. S. Hwang, J. Park, S. Ahn, and T. S. Kim, "Label free novel electrical detection using micromachined PZT monolithic thin film cantilever for the detection of C-reactive protein," Biosens. Bioelectron., vol. 20, no. 2, pp. 269-275, Sep. 2004.
4. 3 thin film cantilever and bridge acoustic sensors for miniaturized photoacoustic gas detectors," J. Micromech. Microeng., vol. 14, no. 12, pp. 1650-1658, Dec. 2004.
5. Y. B. Jeon, R. Sood, J.-H. Jeong, and S.-G. Kim, "MEMS power generator with transverse mode thin film PZT," Sens. Actuators A, Phys., vol. 122, no. 1, pp. 16-22, Jul. 2005.
6. F. Lu, H. P. Lee, and S. P. Lim, "Modeling and analysis ofmicro piezoelectric power generators for micro-electromechanical-systems application," Smart Mater. Struct., vol. 13, no. 1, pp. 57-63, Feb. 2004.
7. D. A. Barrow, T.W. Petroff, R. P. Tandon, and M. Sayer, "Characterization of thick lead zirconate titanate films fabricated using a new sol gel based process," J. Appl. Phys., vol. 81, no. 2, pp. 876-881, Jan. 1997.
8. 3 and MgO," Appl. Phys. Lett., vol. 66, no. 7, pp. 822-824, Feb. 1995.
9. 3 thin films," Appl. Phys. Lett., vol. 70, no. 11, pp. 1378-1380, Mar. 1997.
10. 3 thin films prepared by metal-organic chemical vapor deposition: Systematic compositional variation of electronic and optical properties," J. Appl. Phys., vol. 81, no. 5, pp. 2349-2357, Mar. 1997.
11. K. E. Petersen, "Silicon as a mechanical materials," Proc. IEEE, vol. 70, no. 5, pp. 420-457, May 1982.
12. 3 thin films deposited on stainless steel substrates by RF-magnetron sputtering for MEMS applications," Sens. Actuators A, Phys., vol. 125, no. 2, pp. 382-386, Jan. 2006.
13. K. R. Williams and R. S. Muller, "Eth rates for micromachining processing," J. Microelectromech. Syst., vol. 5, no. 4, pp. 256-269, Dec. 1996.
14. K. Keizer, G. J. Lansink, and A. J. Burggraaf, "Anomalous dielectric behavior of La(III) substituted lead titanate ceramics," J. Phys. Chem. Solids, vol. 39, pp. 59-63, 1977.
15. 2," J. Amer. Ceram. Soc., vol. 50, no. 3, pp. 129-132, 1967.
16. 3 buffer layer by multi-ion-beam sputtering," Jpn. J. Appl. Phys., vol. 32, no. 9B, pp. 4057-4060, Sep. 1993.
17. I. Kanno, H. Kotera, and K.Wasa, "Measurement of transverse piezoelectric properties of PZT thin films," Sens. Actuators A, Phys., vol. 107, no. 1, pp. 68-74, Oct. 2003.
18. 31 piezoelectric coefficient of lead zirconate titanate thin films," J. Appl. Phys. vol. 85, no. 9, pp. 6711-6716, May 1999.
19. 3 thin films," Sens. Actuators A, Phys., vol. 77, no. 2, pp. 106-112, Oct. 1999.
20. J. G. Smits and W. Choi, "The constituent equations of piezoelectric heterogeneous bimorphs," IEEE Trans. Ultrason., Ferroelectr., Freq. Control, vol. 38, no. 3, pp. 256-270, May 1991.
21. H. Jaffe and D. A. Berlincourt, "Piezoelectric transducer materials," Proc. IEEE, vol. 53, no. 10, pp. 1372-1386, Oct. 1965.
22. J. F. Shackelford and W. Alexander, CRC Materials Science and Engineering Handbook, 3rd ed. Boca Raton, FL: CRC Press, 2000.