Elaboration and characterization of Co doped, conductive ZnO thin films deposited by radio-frequency magnetron sputtering at room temperature

Thin Solid Films

Volumn 517, Issue 21, 2009, Pages 6007-6011

  El Mir, L ^a   Ben Ayadi, Z ^a   Rahmouni, H ^a   El Ghoul, J ^a   Djessas, K ^b   von Bardeleben, H J ^c  

^a UNIVERSITY OF GABES   (Tunisia)

^b UNIVERSITÉ DE PERPIGNAN   (France)

^c INSTITUT DES NANOSCIENCES DE PARIS   (France)

Author keywords

Electrical properties and measurements; Electron paramagnetic resonance spectroscopy; Nanostructures; Sputtering; Thin films; Transparent conductive oxide (TCO); X ray diffraction; Zinc oxide

Indexed keywords

ANGULAR VARIATION; AS-DEPOSITED FILMS; CO-DOPED; CO-DOPED ZNO; ELECTRICAL PROPERTIES AND MEASUREMENTS; ELECTRICAL RESISTIVITY; ELECTRON PARAMAGNETIC RESONANCE; ELECTRON PARAMAGNETIC RESONANCE SPECTROSCOPY; EPR SPECTRA; FILM PLANES; MODIFIED SOL-GEL METHOD; MONOCRYSTAL; NANOCRYSTALLINE; OPTICAL TRANSMITTANCE; POLYCRYSTALLINE; QUARTZ SUBSTRATE; RADIO FREQUENCY MAGNETRON SPUTTERING; ROOM TEMPERATURE; SUBSTRATE PLANES; TARGET MATERIALS; TRANSPARENT CONDUCTIVE OXIDE (TCO); VISIBLE RANGE; ZNO THIN FILM;

CARRIER CONCENTRATION; CONDUCTIVE FILMS; DIFFRACTION; ELECTRIC PROPERTIES; ELECTRIC RESISTANCE; ELECTRON RESONANCE; ELECTRON SPIN RESONANCE SPECTROSCOPY; GELATION; MAGNETRONS; NANOSTRUCTURES; ORGANIC LIGHT EMITTING DIODES (OLED); OXIDE FILMS; OXIDE MINERALS; PARAMAGNETIC MATERIALS; PARAMAGNETIC RESONANCE; PARAMAGNETISM; PARTICLE DETECTORS; QUANTUM THEORY; QUARTZ; SEMICONDUCTING ZINC COMPOUNDS; SOL-GEL PROCESS; SPECTRUM ANALYSIS; SUBSTRATES; THIN FILMS; X RAY DIFFRACTION; ZINC; ZINC OXIDE;

COBALT;

EID: 67449142676     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2009.03.197     Document Type: Article

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