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Volumn 32, Issue 2, 2009, Pages 81-88
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Parameter modeling for wafer probe test
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Author keywords
Finite element analysis (FEA); Parameter modeling; Wafer probe test
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Indexed keywords
BOND PADS;
CONTACT FRICTIONS;
CONTACT MODELS;
DEGREE OF DAMAGES;
DESIGN-OF-EXPERIMENTS;
FINITE ELEMENTS;
FINITE-ELEMENT ANALYSIS (FEA);
FINITE-ELEMENT MODELING;
ILD LAYERS;
INTER LAYER DIELECTRICS;
METAL THICKNESS;
MODELING RESULTS;
PARAMETER MODELING;
PRINCIPAL STRESS;
PROBE TIPS;
ROOT CAUSE;
TEST DATUM;
TEST MODELING;
WAFER PROBE TEST;
WIRE BONDINGS;
DENSITY (OPTICAL);
DIFFRACTIVE OPTICAL ELEMENTS;
FINITE ELEMENT METHOD;
FRICTION;
TESTING;
WAFER BONDING;
WIRE;
PROBES;
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EID: 67349272715
PISSN: 1521334X
EISSN: None
Source Type: Journal
DOI: 10.1109/TEPM.2009.2017514 Document Type: Article |
Times cited : (9)
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References (8)
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