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Volumn 32, Issue 2, 2009, Pages 81-88

Parameter modeling for wafer probe test

Author keywords

Finite element analysis (FEA); Parameter modeling; Wafer probe test

Indexed keywords

BOND PADS; CONTACT FRICTIONS; CONTACT MODELS; DEGREE OF DAMAGES; DESIGN-OF-EXPERIMENTS; FINITE ELEMENTS; FINITE-ELEMENT ANALYSIS (FEA); FINITE-ELEMENT MODELING; ILD LAYERS; INTER LAYER DIELECTRICS; METAL THICKNESS; MODELING RESULTS; PARAMETER MODELING; PRINCIPAL STRESS; PROBE TIPS; ROOT CAUSE; TEST DATUM; TEST MODELING; WAFER PROBE TEST; WIRE BONDINGS;

EID: 67349272715     PISSN: 1521334X     EISSN: None     Source Type: Journal    
DOI: 10.1109/TEPM.2009.2017514     Document Type: Article
Times cited : (9)

References (8)
  • 2
    • 24644515426 scopus 로고    scopus 로고
    • Mechanical and electrical characterization of an IC bond pad stack using a novel in-Situ methodology
    • Santa Clara, CA
    • C. D. Hartfield, J. J. Broz, and T. M. Moose, "Mechanical and electrical characterization of an IC bond pad stack using a novel in-Situ methodology," in Proc. 29th Int. Symp. Testing Failure Anal. Santa Clara, CA, 2003, pp. 486-495.
    • (2003) Proc. 29th Int. Symp. Testing Failure Anal , pp. 486-495
    • Hartfield, C.D.1    Broz, J.J.2    Moose, T.M.3
  • 3
    • 0034829037 scopus 로고    scopus 로고
    • Effects of probe damage on wirebond integrity
    • Las Vegas, NV, May
    • G. Hotchkiss et al., "Effects of probe damage on wirebond integrity," in Proc. 51th Electron. Compon. Technol. Conf., Las Vegas, NV, May 2001, pp. 1175-1180.
    • (2001) Proc. 51th Electron. Compon. Technol. Conf , pp. 1175-1180
    • Hotchkiss, G.1
  • 4
    • 0037674395 scopus 로고    scopus 로고
    • Problems with wirebonding on probe marks and possible solutions
    • New Orleans, LA, May
    • W. Sauter et al., "Problems with wirebonding on probe marks and possible solutions," in Proc. 53th Electron. Compon. Technol. Conf. New Orleans, LA, May 2003, pp. 1350-1358.
    • (2003) Proc. 53th Electron. Compon. Technol. Conf , pp. 1350-1358
    • Sauter, W.1
  • 5
    • 24644435002 scopus 로고    scopus 로고
    • Probe test failure analysis of bond pad over active structure by modeling and experiment
    • Lake Buena Vista, FL, May
    • Y. Liu et al., "Probe test failure analysis of bond pad over active structure by modeling and experiment," in Proc. 55th Electron. Compon. Technol. Conf., Lake Buena Vista, FL, May 2005, pp. 861-866.
    • (2005) Proc. 55th Electron. Compon. Technol. Conf , pp. 861-866
    • Liu, Y.1
  • 6
    • 67349135039 scopus 로고    scopus 로고
    • Simulation of wafer probing process considering probe dynamics
    • London, U.K
    • I. Schmadlak and H. Torsten, "Simulation of wafer probing process considering probe dynamics," in Proc. EuroSimE'07, London, U.K., 2007, pp. 278-282.
    • (2007) Proc. EuroSimE'07 , pp. 278-282
    • Schmadlak, I.1    Torsten, H.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.