Characterization of nanopores in PFA thin films

Surface and Coatings Technology

Volumn 203, Issue 17-18, 2009, Pages 2493-2496

  Minamisawa, Renato Amaral ^a   Zimmerman, Robert Lee ^a   Ila, Daryush ^a  

^a ALABAMA A AND M UNIVERSITY   (United States)

Author keywords

AFM; Ion Beam; Nanofabrication; Nanopores; PFA; Porous Membranes

Indexed keywords

AFM; CHEMICAL ETCHING TECHNIQUES; DIAMETER DISTRIBUTIONS; FABRICATION PROCESS; FEED BACK SYSTEMS; GOLD IONS; HYDROPHOBIC FILTERS; ION BEAM SYSTEMS; MICRO-RAMAN; NANOFABRICATION; PELLETRON; PFA; PORE PROPERTIES; POROUS MEMBRANES; RESEARCH METHODS; SYNTHETIC POLYMERS; THIN FILM MEMBRANES;

AIR FILTERS; ATOMIC FORCE MICROSCOPY; CHROMATOGRAPHIC ANALYSIS; GAS CHROMATOGRAPHY; HYDROPHOBIC CHROMATOGRAPHY; ION BEAMS; IONS; NANOPORES; THIN FILMS;

MEMBRANES;

EID: 67349237020     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2009.02.045     Document Type: Article

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