Study on evolution of gases from fluoropolymer films bombarded with heavy ions

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 266, Issue 8, 2008, Pages 1269-1272

  Minamisawa, Renato Amaral ^a   Zimmerman, Robert Lee ^a   Budak, Satilmis ^a   Ila, Daryush ^a  

^a ALABAMA A AND M UNIVERSITY   (United States)

Author keywords

AFM; Damage; Ion bombardment; OA; PFA polymer; Raman; RGA; Sputtering

Indexed keywords

ATOMIC FORCE MICROSCOPY; HEAVY IONS; ION BOMBARDMENT; MOLECULAR STRUCTURE; POLYMER FILMS; SPUTTERING;

ELECTRONIC EXCITATION; GOLD IONS; RESIDUAL GAS ANALYZER (RGA);

FLUORINE CONTAINING POLYMERS;

EID: 43049168907     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2008.01.054     Document Type: Article

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