Creation mechanism of pores by ion beam modification of fluoropolymer film membranes

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 266, Issue 8, 2008, Pages 1273-1275

  Minamisawa, Renato Amaral ^a   Zimmerman, Robert Lee ^a   Ila, Daryush ^a  

^a ALABAMA A AND M UNIVERSITY   (United States)

Author keywords

AFM; Ion beam; Nanopores; PFA polymer; Sputtering; Thermal effects

Indexed keywords

ATOMIC FORCE MICROSCOPY; FEEDBACK CONTROL; FLUORINE CONTAINING POLYMERS; MOLECULAR ELECTRONICS; POLYMER FILMS; POLYMERIC MEMBRANES; SURFACE TREATMENT;

ION BEAM APPARATUS; ION BEAM INTERACTION; MOLECULAR ELECTRICAL JUNCTIONS;

ION BEAMS;

EID: 43049161159     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2008.02.016     Document Type: Article

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