SCOPUS 정보 검색 플랫폼

Volumn 9, Issue 3 SUPPL., 2009, Pages

Effect of tin concentrations on properties of indium tin oxide films deposited on PET substrate under various conditions

(6) Kang, Yong Min a Lee, Dong Yeop a Lee, Jung Rak a Lee, Gun Hwan b Cho, Young Rae a Song, Pung Keun a

a Pusan National University (South Korea)

b Korea Institute of Material Science (South Korea)

Author keywords

Bending test; DC magnetron sputtering; Indium tin oxide; ITO; Mechanical property

Indexed keywords

DC MAGNETRON SPUTTERING; DC POWER; DEPOSITION CONDITIONS; DYNAMIC STRESS; ELECTRICAL AND MECHANICAL PROPERTIES; FILM SURFACES; HIGH DENSITY; HIGH-ENERGY PARTICLES; INDIUM TIN OXIDE; INDIUM TIN OXIDE FILMS; ITO; ITO FILMS; PET SUBSTRATE; SN CONCENTRATION; SPUTTERED ATOMS; SUBSTRATE HEATING; TOTAL GAS PRESSURE;

INDIUM; MAGNETRONS; MECHANICAL PROPERTIES; PHOTOLITHOGRAPHY; POLYETHYLENE TEREPHTHALATES; SPUTTERING; SUBSTRATES; TARGETS; THERMOPLASTICS; TIN;

OXIDE FILMS;

EID: 67349225791 PISSN: 15671739 EISSN: None Source Type: Journal
DOI: 10.1016/j.cap.2009.01.032 Document Type: Article

Times cited : (8)

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