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Volumn 14, Issue 6, 2008, Pages 745-751
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Characteristics of ITO films deposited on a PET substrate under various deposition conditions
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Author keywords
Dynamic bending test; Flexible substrate; Indium tin oxide; Low temperature deposition; PET
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Indexed keywords
INDIUM COMPOUNDS;
POLYETHYLENE TEREPHTHALATES;
SPUTTERING;
SUBSTRATES;
TEMPERATURE;
TIN OXIDES;
DC MAGNETRON SPUTTERING;
DEPOSITION CONDITIONS;
DYNAMIC BENDING TEST;
FLEXIBLE SUBSTRATE;
INDIUM TIN OXIDE;
LOW-TEMPERATURE DEPOSITION;
TARGET-SUBSTRATE;
TOTAL GAS PRESSURE;
ITO GLASS;
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EID: 58149262983
PISSN: 15989623
EISSN: None
Source Type: Journal
DOI: 10.1007/BF03027991 Document Type: Article |
Times cited : (28)
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References (13)
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