ITO films deposited by rf-PERTE on unheated polymer substrates - Properties dependence on In-Sn alloy composition

Materials Science and Engineering: B

Volumn 109, Issue 1-3, 2004, Pages 245-248

  De Carvalho, C Nunes ^a,b   Lavareda, G ^a,b   Fortunato, E ^a   Vilarinho, P ^c   Amaral, A ^b  

^a UNIVERSIDADE NOVA DE LISBOA   (Portugal)

^b INSTITUTO SUPERIOR TÉCNICO   (Portugal)

^c UNIVERSITY OF AVEIRO   (Portugal)

Author keywords

In Sn alloy; Indium tin oxide (ITO); Polymer Substrates; rf Plasma enhanced reactive thermal evaporation (rf PERTE); Room temperature

Indexed keywords

ANNEALING; CARRIER MOBILITY; COMPOSITION; DEPOSITION; ELECTRIC CONDUCTIVITY; EVAPORATION; INDIUM COMPOUNDS; LIGHT TRANSMISSION; POLYETHYLENE TEREPHTHALATES; SUBSTRATES; THERMAL EFFECTS;

PLASMA ENHANCED REACTIVE THERMAL EVAPORATION (PERTE); POLYMER SUBSTRATES; RADIO FREQUENCIES; SPRAY PYROLYSIS;

THIN FILMS;

EID: 2342469998     PISSN: 09215107     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mseb.2003.10.089     Document Type: Conference Paper

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