Replication of micro/nano combined structure using micro/nano combined aluminum stamp

Technical Proceedings of the 2008 NSTI Nanotechnology Conference and Trade Show, NSTI-Nanotech, Nanotechnology 2008

Volumn 1, Issue , 2008, Pages 491-494

  Cha, Kyoung Je ^a   Kwon, Tai Hun ^a  

^a Pohang University of Science and Technology (POSTECH)   (South Korea)

Author keywords

Aluminum stamp with micro nano combined structure (ASMNCS); Anodic aluminum oxide (AAO); Contact angle; Hot embossing; Micro nano combined structure (MNCS)

Indexed keywords

ABS RESINS; ALUMINUM; COMMERCE; CONTACT ANGLE; EXHIBITIONS; LIGHT METALS; NANOTECHNOLOGY; PLATES (STRUCTURAL COMPONENTS); POLYMER FILMS;

ALUMINUM STAMP WITH MICRO/NANO COMBINED STRUCTURE (ASMNCS); ANODIC ALUMINUM OXIDE (AAO); HOT EMBOSSING; MICRO/NANO COMBINED STRUCTURE (MNCS);

ALUMINA;

EID: 53349145425     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)

1. Metin Sitti, "Synthetic Gecko Foot-Hair Micro/Nano -Structures as Dry Adhesives", Appeared in Journal of Adhesion Science and Technology, VOL.18, pp.1055-1074, 2003
2. Dong Sung Kim, Han Ul Lee, Nam Hyo Kim, Kun-Hong Lee, Dong-Woo Cho and Tai Hun Kwon, "Fabrication of microchannel with nanopillar array using micromachined AAO", Micro- and Nano-Engineering, In: Proceedings of 32nd international conference on micro- and nano-engineering: P-NSC45
3. Jang Min Park, Nam Hyo Kim, Bong-Kee Lee, Kun-Hong Lee, Tai Hun Kwon, "Nickel stamp fabrication and hot embossing for mass-production of micro/nano combined structures using anodic aluminum oxide", Microsystem Technology, online first, 2008
4. D. Mijatovic, J. C. T. Eijkel and A. van den Berg, "Technologies for nanofluidic systems: top-down vs. bottom-up - a review", Lab Chip, 5, 492-500, 2005
5. Ralf B. Wehrpohn, "Ordered Porous Nanostructures and Applications: chapter3.Highly Ordered Nanohole Arrays in Anodic Porous Alumina", ISBN: 0-387-23541-8
6. Chang Liu, "Foundations of MEMS: Chapter 10. Bulk Micromachining and Silicon Anisotropic Etching", ISBN: 0-13-147286-0