A comb drive actuated vertically moving micromirror for tunable mid-infrared Resonant Cavity Enhanced Detectors

Microelectronic Engineering

Volumn 86, Issue 4-6, 2009, Pages 1243-1246

  Quack, Niels ^a   Rüst, Philipp ^a   Blunier, Stefan ^a   Dual, Jurg ^a   Felder, Ferdinand ^b   Rahim, Mohamed ^b   Fill, Matthias ^b   Arnold, Martin ^b   Zogg, Hans ^b  

^a Institute of Mechanical Systems (IMES)   (Switzerland)

^b ETH ZURICH   (Switzerland)

Author keywords

Fabry perot; IR detector; MEMS; Micromirror; Microspectrometer; Mid infrared; RCED; Tunable

Indexed keywords

FABRY-PEROT; IR-DETECTOR; MICROMIRROR; MICROSPECTROMETER; MID-INFRARED; RCED; TUNABLE;

ACTUATORS; CAVITY RESONATORS; DETECTORS; ELECTROSTATIC ACTUATORS; FABRY-PEROT INTERFEROMETERS; MEMS; MICROELECTROMECHANICAL DEVICES; MIRRORS;

INFRARED DEVICES;

EID: 67349084083     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2008.12.064     Document Type: Article

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