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Volumn 6467, Issue , 2007, Pages

Compact large-stroke piston-tip-tilt actuator and mirror

Author keywords

Adaptive optics; Fabry Perot; Micromirror; Piston tip tilt; Vertical actuator

Indexed keywords

ACTUATORS; ADAPTIVE OPTICS; OPTICAL SYSTEMS; SILICON ON INSULATOR TECHNOLOGY;

EID: 34248590034     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.698937     Document Type: Conference Paper
Times cited : (4)

References (7)
  • 1
    • 0036421239 scopus 로고    scopus 로고
    • Torsional MEMS scanner design for high-resolution display systems
    • Seattle, Washington, July
    • H. Urey, "Torsional MEMS scanner design for high-resolution display systems", Proceedings of SPIE, Seattle, Washington, Vol. 4773, July 2002, pp. 27-37.
    • (2002) Proceedings of SPIE , vol.4773 , pp. 27-37
    • Urey, H.1
  • 5
    • 0036851061 scopus 로고    scopus 로고
    • Large-Displacement Vertical Microlens Scanner With Low Driving Voltage
    • November
    • S. Kwon, V. Milanovic, L. P. Lee, "Large-Displacement Vertical Microlens Scanner With Low Driving Voltage", IEEE Photonics Letters, Vol. 14, No. 11, November 2002, pp. 1572-1574.
    • (2002) IEEE Photonics Letters , vol.14 , Issue.11 , pp. 1572-1574
    • Kwon, S.1    Milanovic, V.2    Lee, L.P.3
  • 6
    • 3042823621 scopus 로고    scopus 로고
    • A Clean Wafer-Scale Chip-Release Process without Dicing based on Vapor Phase Etching
    • Maastricht, The Netherlands
    • T. Overstolz, P. A. Clerc, W. Noell, M. Zickar, and N. F. de Rooij, "A Clean Wafer-Scale Chip-Release Process without Dicing based on Vapor Phase Etching", Proceedings of the IEEE MEMS Conference, Maastricht, The Netherlands. 2004, pp. 717-720.
    • (2004) Proceedings of the IEEE MEMS Conference , pp. 717-720
    • Overstolz, T.1    Clerc, P.A.2    Noell, W.3    Zickar, M.4    de Rooij, N.F.5


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.