Tunable resonant cavity enhanced detectors using vertically actuated MEMS mirrors

Journal of Optics A: Pure and Applied Optics

Volumn 10, Issue 4, 2008, Pages

  Quack, Niels ^a   Blunier, Stefan ^a   Dual, Jurg ^a   Arnold, Martin ^b   Felder, Ferdinand ^b   Ebneter, Christian ^b   Rahim, Mohamed ^b   Zogg, Hans ^b  

^a Institute of Mechanical Systems (IMES)   (Switzerland)

^b ETH ZURICH   (Switzerland)

Author keywords

Infrared detector; MEMS; Micromirror; Tunable RCED

Indexed keywords

CAVITY RESONATORS; LASER TUNING; MEMS; MICROOPTICS; MIRRORS; WAVELENGTH;

MEMS MIRRORS; MICROMIRRORS; RESONANT CAVITY ENHANCED DETECTORS (RCED);

INFRARED DETECTORS;

EID: 43049119671     PISSN: 14644258     EISSN: 17413567     Source Type: Journal    
DOI: 10.1088/1464-4258/10/4/044015     Document Type: Article

References (9)

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