Mid-infrared tunable Resonant Cavity Enhanced Detectors

Sensors

Volumn 8, Issue 9, 2008, Pages 5466-5478

  Quack, Niels ^a   Blunier, Stefan ^a   Dual, Jurg ^a   Felder, Ferdinand ^b   Arnold, Martin ^b   Zogg, Hans ^b  

^a Institute of Mechanical Systems (IMES)   (Switzerland)

^b ETH ZURICH   (Switzerland)

Author keywords

Fabry Perot; MEMS; Micro spectrometer; Micromirror; Mid infrared; RCED

Indexed keywords

FABRY-PEROT; MICRO MIRROR; MICRO-SPECTROMETER; MIDINFRARED; RCED;

CAVITY RESONATORS; ELECTROSTATIC ACTUATORS; FABRY-PEROT INTERFEROMETERS; INFRARED DEVICES; MEMS; MICROELECTROMECHANICAL DEVICES; MIRRORS; SPECTROMETERS;

DETECTORS;

EID: 53349098750     PISSN: 14248220     EISSN: None     Source Type: Journal    
DOI: 10.3390/s8095466     Document Type: Article

References (8)

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