Effects of thermal annealing on titanium oxide films prepared by ion-assisted deposition

Optical Review

Volumn 16, Issue 3, 2009, Pages 396-399

  Jaing, Cheng Chung ^a   Chen, Hsi Chao ^b   Lee, Cheng Chung ^c  

^a MINGHSIN UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Taiwan)

^b DE LIN INSTITUTE OF TECHNOLOGY   (Taiwan)

^c NATIONAL CENTRAL UNIVERSITY   (Taiwan)

Author keywords

Ion assisted deposition; Mechanical properties; Optical properties; Substrate temperature; Thermal annealing; Titanium oxide films

Indexed keywords

EID: 67149092199     PISSN: 13406000     EISSN: 13499432     Source Type: Journal    
DOI: 10.1007/s10043-009-0075-7     Document Type: Article

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