Laser micro-fabrication in RF MEMS switches

Proceedings - 2009 13th International Symposium on Antenna Technology and Applied Electromagnetics and the Canadian Radio Sciences Meeting, ANTEM/URSI 2009

Volumn , Issue , 2009, Pages

  Jimin, Chen ^a   Yuehua, Yin ^a  

^a BEIJING UNIVERSITY OF TECHNOLOGY   (China)

Author keywords

Laser deposition; Laser direct writing; Lithography; Micro fabrication; RF MEMS

Indexed keywords

HIGH ISOLATION; HIGH LINEARITY; HIGH QUALITY; KEY ELEMENTS; LASER DEPOSITION; LASER DEPOSITIONS; LASER DIRECT WRITING; LASER LITHOGRAPHY; LASER MICRO-FABRICATION; LASER TECHNIQUE; LASER TECHNOLOGIES; LOW INSERTION LOSS; LOW-POWER CONSUMPTION; MM-WAVE; PIN DIODE; RF MEMS; RF-MEMS SWITCHES; WORKING PRINCIPLES;

ELECTRIC SWITCHES; FABRICATION; LASER BEAM EFFECTS; LITHOGRAPHY; MEMS; MICROELECTROMECHANICAL DEVICES; SEMICONDUCTING SILICON COMPOUNDS; SEMICONDUCTOR DIODES; TECHNOLOGY;

LASERS;

EID: 66849097227     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ANTEMURSI.2009.4805056     Document Type: Conference Paper

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