Laser applications in the field of MEMS

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7007, Issue , 2008, Pages

  Moagar Poladian, Gabriel ^a   Illyefalvi Vitez, Zsolt ^b   Balogh, Balint ^b   Ulieru, Dumitru ^c   Coraci, Antonie ^a  

^a NATIONAL INSTITUTE FOR RESEARCH AND DEVELOPMENT IN MICROTECHNOLOGIES   (Romania)

^b BUDAPEST UNIVERSITY OF TECHNOLOGY AND ECONOMICS   (Hungary)

^c Romes SA   (Romania)

Author keywords

[No Author keywords available]

Indexed keywords

COMPOSITE MICROMECHANICS; COMPUTER NETWORKS; ELECTROCHEMICAL SENSORS; LASER APPLICATIONS; LASERS; LITHOGRAPHY; MEMS; MICROELECTROMECHANICAL DEVICES; PULSED LASER DEPOSITION; TECHNOLOGY;

(140.3500) LASERS; (OTDR) TECHNOLOGY; INDUSTRIAL LASER APPLICATIONS; LASER TECHNIQUES; MEMS TESTING; WIDE-RANGE; WORKING PRINCIPLES;

SOFTWARE TESTING;

EID: 45149122383     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.801970     Document Type: Conference Paper

References (17)

1. Pulsed Laser Deposition of Thin Films, edited by Douglas B. Chrisey and Graham K. Hubler, John Wiley & Sons, (1994).
2. Chin, R.K., Beuth, J.L. and Amon, C.H. (1995) "Control of Residual Stresses in Shape Deposition Manufacturing," Proceedings Solid Freeform Fabrication Symposium, The University of Texas at Austin, pp. 221-228.
3. Merz, R., Prinz, F.B., Ramaswami, K., Terk, M., and Weiss, L.E. (1994) "Shape Deposition 4. Manufacturing," Proceedings Solid Freeform Fabrication Symposium, The University of Texas at Austin, pp. 1-8.
4. Senthilnathan Mohanan - Laser assisted film deposition , Advanced Materials, 02-02-2004, http://www.uniulm.de/ilm/AdvancedMaterials/Presentation/ MahananLaserassistedfilmdeposition.pdf
5. W. Han, R. J. Pryputniewicz - Mechanical Characterizations of Laser Microwelds for MEMS Packaging, Mat. Res. Soc. Symp. Proc. Vol. 782, p. A5.82.1 - A.5.82.6, (2004).
6. W.-S. CHANG, S.-J. NA - A Study on Heat Source Equations for the Prediction of Weld Shape and Thermal Deformation in Laser Microwelding, Metallurgical and Materials Transactions B, VOLUME 33B, p. 757-762, (2002).
7. M. Popescu, A. Andries, V. Ciumaş, M. lovu, S. Sutov, D. Tiuleanu - The Physics of Chalcogenide Glasses, Editura Ştiinţificã Bucureşti & I. E. P. Ştiinţa Chişinãu, (1996) (in Romanian).
8. S. J. Berkes, S. W. Ing, W. J. Hillegas - J. Appl. Phys. Vol. 42, p.4908, (1971).
9. G. Nemeş - Introduction to Nonlinear Optics, Editura Academiei R.S.R. (1972) (in Romanian).
10. S. Jeon, V. Malyarchuk, J. A. Rogers - "Fabricating Three Dimensional Nanostructures Using Two Photon Lithography in a Single Exposure Step", Optics Express vol. 14, no. 6, p. 2300 - 2308 (2006).
11. M. C. Teich, B. E. A. Saleh, A. V. Sergienko, J. Fourkas - "Three Dimensional Fabrication Using Entangled-Photon Lithography", US Patent US 2002/0093632 A1, (2002).
12. R. M. Bârsan - Physics and Technology of Large Scale Integrated MOS Circuits, Editura Academiei R.S.R. (1989) (in Romanian).
13. D. Bratton, D. Yang, J. Dai, C. K. Ober - "Recent Progress in High Resolution Lithography", Polym. Adv. Technol. Vol. 17, p. 94 - 103, (2006).
14. G. Moagǎr-Poladian - Sub - Wavelength Resolution Laser Lithography in the Field of MEMS, Proceedings of the First International Conference on Industrial Application of Lasers, p. xx - yy, (2007).
15. Juntao Xu, Changgong Zhou, Sheila Grant, Edward Nadgorny, Jaroslaw Drelich - Laser Guidance Deposition Technique for Patterning Microstructures Made of Nanoparticles with Varying Surface Functionality, Mat. Res. Soc. Symp. Proc. Vol. 728, p. S 7.6.1 - S 7.6.6, (2002).
16. F. Shen, J. Xu, A. Wang - Measurement of the Frequency Response of a Diaphragm-Based Pressure Sensor by Use of a Pulsed Excimer Laser, Optics Letters, vol. 30 no. 15, p. 1935 (2005).
17. G. Moagǎr-Poladian - On the Light Pressure Induced in a Medium by the Non-Uniform Light Intensity Distribution, accepted for publication in Journal of Optics: Pure and Applied.