Incorporation of linear spacer molecules in vapor-deposited silicone polymer thin films

Macromolecules

Volumn 42, Issue 6, 2009, Pages 1970-1978

  Achyuta, Anil Kumar H ^a   White, Aleksandr J ^b   Lewis, Hilton G Pryce ^b   Murthy, Shashi K ^a  

^a Northeastern University   (United States)

^b GVD Corporation   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESION PROPERTIES; BULK RESISTIVITY; CROSSLINKED STRUCTURES; FILM FORMATIONS; GROWTH MECHANISMS; HYDROLYTIC STABILITY; INSULATING THIN FILMS; LINEAR SPACERS; MANUFACTURING STANDARD; NEURAL PROBES; NON-POLAR SOLVENTS; PARYLENE C; POTENTIAL APPLICATIONS; REACTIVE SPECIES; SILICON SUBSTRATES; SILICONE POLYMERS; SPECTROSCOPIC EVIDENCE; STERIC BARRIER; SUBSTRATE TEMPERATURE; SYNTHESIS RATE; TERT-BUTYL PEROXIDE;

ACTIVATION ENERGY; ADHESION; ADSORPTION; CROSSLINKING; OPTICAL RESOLVING POWER; POLYMER FILMS; SILICONES; THIN FILM DEVICES; THIN FILMS; VAPORS;

SUBSTRATES;

EID: 66649132815     PISSN: 00249297     EISSN: None     Source Type: Journal    
DOI: 10.1021/ma802330s     Document Type: Article

References (22)

1. O'Shaughnessy, W. S.; Gao, M. L.; Gleason, K. K. Langmuir 2006, 22, 7021.
2. O'Shaughnessy, W. S.; Murthy, S. K.; Edell, D. J.; Gleason, K. K. Biomacromolecules 2007, 8, 2564.
3. Lau, K. K. S.; Caulfield, J. A.; Gleason, K. K. Chem. Mater. 2000, 12, 3032.
4. Lau, K. K. S.; Gleason, K. K. Macromolecules 2006, 39, 3688.
5. Lau, K. K. S.; Gleason, K. K. Macromolecules 2006, 39, 3695.
6. Chan, K.; Gleason, K. K. Chem. Vap. Deposition 2005, 11, 437.
7. Chan, K.; Gleason, K. K. Lanemuir 2005, 21, 8930.
8. Lin-Vien, D.; Colthup, N. B.; Fately, W. G.; Grasselli, J. C. In The Handbook of Infrared and Raman Characteristic Frequencies of Organic Molecules; Academic Press: San Diego, CA, 1991.
9. Lipp, E. D.; Smith, A. L. In The Analytical Chemistry of Silicones; Smith, A. L., Ed.; John Wiley & Sons: New York, 1991, p 305.
10. Rau, C.; Kulisch, W. Thin Solid Films 1994, 249, 28.
11. Burkey, D. D.; Gleason, K. K. J. Appl. Phys. 2003, 93, 5143.
12. Murthy, S. K.; Olsen, B. D.; Gleason, K. K. Lanemuir 2002, 18, 6424.
13. Murthy, S. K.; Olsen, B. D.; Gleason, K. K. J. Appl. Polym. Sci. 2004, 91, 2176.
14. Mao, Y.; Gleason, K. K. Langmuir 2004, 20, 2484.
15. Odian, G. G. In Principles of Polymerization, 3rd ed.; Wiley: New York, 1991.
16. Adamson, A. W.; Gast, A. P. In Physical Chemistry of Surfaces, 6th ed.; John Wiley & Sons: New York, 1997.
17. Lewis, H. G. P.; Caulfield, J. A.; Gleason, K. K. Lanemuir 2001, 17, 7652.
18. Pierson, O. H. In Handbook of Chemical Vapor Deposition: Principles, Technology, and Applications, 2nd ed.; Noyes Publications: Norwich, NY, 1999.
19. Fogler, H. S. In Elements of Chemical Reaction Engineering, 3rd ed.; Prentice Hall: Upper Saddle River, NJ, 1999.
20. Troyk, P. R.; Watson, M. J.; Poyezdala, J. J. ACS Symp. Ser. 1986, 322, 299.
21. Anderson, J. E.; Markovac, V.; Troyk, P. R. IEEE Trans. Compon., Hybrids, Manuf. Technol. 1988, 11, 152.
22. Mark, J. E. In Polymer Data Handbook, 3rd ed.; Oxford University Press: New York, 1999.