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Volumn 16, Issue 5, 2009, Pages
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Permanent-magnet helicon sources and arrays: A new type of rf plasma
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Author keywords
[No Author keywords available]
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Indexed keywords
DC MAGNETIC FIELD;
DENSITY UNIFORMITY;
HELICON DISCHARGE;
HELICON SOURCES;
HIGH DENSITY;
HIGH DENSITY PLASMAS;
PARTIALLY IONIZED PLASMA;
REMOTE FIELDS;
RF PLASMA;
RF-POWER;
RING MAGNET;
TUBE ARRAYS;
ELECTRIC DISCHARGES;
MAGNETIC FIELDS;
PERMANENT MAGNETS;
PLASMAS;
HELICONS;
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EID: 66449100021
PISSN: 1070664X
EISSN: None
Source Type: Journal
DOI: 10.1063/1.3089287 Document Type: Conference Paper |
Times cited : (32)
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References (14)
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