Large etch-selectivity enhancement in the epitaxial liftoff of single-crystal LiNbO3 films

Applied Physics Letters

Volumn 74, Issue 21, 1999, Pages 3197-3199

  Radojevic, A M ^a   Levy, M ^a   Osgood Jr , R M ^a   Kumar, A ^b   Bakhru, H ^b   Tian, C ^c   Evans, C ^c  

^a Och Spine at New York Presbyterian Hospitals   (United States)

^b STATE UNIVERSITY OF NEW YORK   (United States)

^c CHARLES EVANS AND ASSOCIATES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL BONDS; COMPOSITION EFFECTS; EPITAXIAL GROWTH; ETCHING; FERROELECTRIC MATERIALS; HELIUM; ION IMPLANTATION; LITHIUM NIOBATE; RAPID THERMAL ANNEALING; SECOND HARMONIC GENERATION; SINGLE CRYSTALS; THERMAL EFFECTS;

EPITAXIAL LIFTOFF; ETCH-SELECTIVITY ENHANCEMENT;

DIELECTRIC FILMS;

EID: 0032606471     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.124115     Document Type: Article

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