Extremely thin, single-crystal films of LiNbO 3 fabricated using localized He + ion-implantation

2005 Conference on Lasers and Electro-Optics, CLEO

Volumn 1, Issue , 2005, Pages 229-231

  Djukic, D ^a   Izubara, T ^a   Roth, R M ^a   Osgood Jr , R M ^a   Bakhru, S ^b   Bakhru, H ^b  

^a Columbia University ^*  (United States)

^b STATE UNIVERSITY OF NEW YORK   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

SINGLE-CRYSTAL FILMS;

ETCHING; LITHIUM NIOBATE; SILICON WAFERS; SINGLE CRYSTALS; WAVEGUIDES;

THIN FILMS;

EID: 30844440293     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)

1. T. Izuhara, R. Roth, R.M. Osgood, Jr., S. Bakhru and H. Bakhni. "Low-voltage tunable TE/TM converter on ion-sliced lithium niobate thin film," Electronics Letters, 39, 1118 (2003).
2. 3 for Integrated Optics Applications at 1.55 μm," IEEE Photonics Tech. Lett. 12, 1653 (2000).
3. 3 Pyroelectric-Bicell Optical Detector" IEEE Photonic Technology Letters, 13, 851 (2001).
4. M. Levy, R.M. Osgood, Jr., R. Liu, L.E. Cross, G.S. Cargill III, A. Kumar, and H. Bakhru, "Fabrication of single-crystal lithium niobate films by crystal ion slicing," Appl. Phys. Lett. 73, 2293 (1998).
5. 3 films," Applied Physics Letters, 74, 3197, (1999).