Ion beam sputtering nanopatterning of thin metal films: The synergism of kinetic self-organization and coarsening

Journal of Physics Condensed Matter

Volumn 21, Issue 22, 2009, Pages

  Stepanova, M ^a,b   Dew, S K ^b  

^a NATIONAL RESEARCH COUNCIL CANADA   (Canada)

^b UNIVERSITY OF ALBERTA   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

COMPLEX INTERACTION; CU FILMS; HETEROSTRUCTURES; ION-BEAM SPUTTERING; KINETIC INSTABILITY; KINETIC MONTE CARLO MODELING; METAL PATTERNS; METALLIC STRUCTURES; NANOPATTERNING; NUMERICAL AND EXPERIMENTAL STUDY; SELF ASSEMBLED STRUCTURES; SELF-ASSEMBLED ARRAYS; SELF-ORGANIZATION; SELF-ORGANIZED; SURFACE NANOSTRUCTURE; SURFACE PATTERN; THERMODYNAMIC EQUILIBRIA; THIN METAL FILMS; TWO STAGE; TWO-STAGE PROCESS;

COARSENING; COPPER; ION BEAMS; METALLIC FILMS; NANOCRYSTALLINE MATERIALS; NANOSTRUCTURES; SILICON COMPOUNDS; SPUTTERING; SURFACE DIFFUSION; SURFACES;

SUBSTRATES;

EID: 66249125724     PISSN: 09538984     EISSN: 1361648X     Source Type: Journal    
DOI: 10.1088/0953-8984/21/22/224014     Document Type: Article

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