Fabrication and atomistic modeling of ion-etch nanostructures on substrates

Materials Research Society Symposium Proceedings

Volumn 849, Issue , 2005, Pages 35-40

  Stepanova, Maria ^a   Dew, Steven K ^a  

^a UNIVERSITY OF ALBERTA   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; COPPER; ETCHING; GLASS; SILICON; SPUTTERING; SUBSTRATES; THIN FILMS;

ATOMISTIC MODELING; CONTROL FACTORS; METAL NETWORKS; SPUTTER INSTABILITY;

NANOSTRUCTURED MATERIALS;

EID: 23844521289     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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