Ion/molecule reactions in sih4/h2s and geh 4/h2s mixtures

Journal of Mass Spectrometry

Volumn 44, Issue 5, 2009, Pages 725-734

  Antoniotti, Paola ^a   Operti, Lorenza ^a   Rabezzana, Roberto ^a   Turco, Francesca ^a   Vaglio, Gian Angelo ^a   Grandinetti, Felice ^b  

^a UNIVERSITY OF TURIN   (Italy)

^b Dipartimento di Scienze Ambientali   (Italy)

Author keywords

Gas phase ion chemistry; Germane; Ion trap mass spectrometry; Semiconductors; Silane

Indexed keywords

AMORPHOUS SOLIDS; GAS PHASE ION CHEMISTRY; GERMANE; ION TRAP MASS SPECTROMETRY; ION/MOLECULE REACTIONS; IONIZATION MODES; MIXED-ION; S-SYSTEM; SEMICONDUCTORS;

CHEMICAL VAPOR DEPOSITION; GAS DYNAMICS; GASES; GERMANIUM; IONIZATION OF GASES; ISOMERS; MASS SPECTROMETERS; MASS SPECTROMETRY; SEMICONDUCTOR GROWTH; SILANES; SPECTRUM ANALYSIS;

IONS;

GERMANIUM; HYDROGEN SULFIDE; SILANE;

ARTICLE; CHEMICAL BOND; CHEMICAL REACTION; COMPLEX FORMATION; DEHYDROGENATION; GAS MIXING; ION TRAP MASS SPECTROMETRY; IONIZATION; POLYMERIZATION; PRIORITY JOURNAL; SOLID;

EID: 66249090187     PISSN: 10765174     EISSN: 10969888     Source Type: Journal    
DOI: 10.1002/jms.1548     Document Type: Article

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