Argon-dominated plasma beam generated by filtered vacuum arc and its substrate etching

Applied Surface Science

Volumn 255, Issue 17, 2009, Pages 7780-7785

  Tanoue, Hideto ^a   Kamiya, Masao ^a,b   Oke, Shinichiro ^a   Suda, Yoshiyuki ^a   Takikawa, Hirofumi ^a   Hasegawa, Yushi ^c   Taki, Makoto ^c   Kumagai, Masao ^d   Kano, Makoto ^d   Ishikawa, Takeshi ^e   Yasui, Haruyuki ^f  

^a TOYOHASHI UNIVERSITY OF TECHNOLOGY   (Japan)

^b Itoh Optical Industrial Co Ltd   (Japan)

^c Onward Ceramic Coating Co Ltd   (Japan)

^d KANAGAWA ACADEMY OF SCIENCE AND TECHNOLOGY   (Japan)

^e HITACHI LTD   (Japan)

^f INDUSTRIAL RESEARCH INSTITUTE OF ISHIKAWA   (Japan)

Author keywords

Ar dominated plasma beam; Carbon vacuum arc; DLC film; Substrate etching; T shape filtered arc deposition (T FAD) system

Indexed keywords

ARGON; DEPOSITION; ETCHING; PASSIVE FILTERS; SILICON WAFERS; VACUUM APPLICATIONS; VACUUM TECHNOLOGY;

DLC FILM; PLASMA BEAM; SUBSTRATE ETCHING; T-SHAPE FILTERED ARC DEPOSITION; VACUUM ARCS;

BEAM PLASMA INTERACTIONS;

EID: 66049083195     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2009.04.170     Document Type: Article

References (17)

1. In: Ohtake N. (Ed). Application and Technology of DLC Films (2007), CMC Publishing, Japan [in Japanese]
2. Lettington A.H. Application of diamond-like carbon thin films. Carbon 36 (1998) 555-560
3. Dearnaley G., and Arps J.H. Biomedical applications of diamond-like carbon (DLC) coatings: a review. Surf. Coat. Technol. 200 (2005) 2518-2524
4. Kano M. Super low friction of DLC applied to engine cam follower lubricated with ester-containing oil. Tribology 39 (2006) 1682-1685
5. Neuville S., and Matthews A. A perspective on the optimization of hard carbon and related coatings for engineering applications. Thin Solid Films 515 (2007) 6619-6653
6. Tan M., Yan Y., Zhang H., Han X., Zhu J., Han J., and Ma H. Corrosion protection of ultra-thin ta-C films for recording slider applications at varied substrate bias. Surf. Coat. Technol. 203 (2009) 963-966
7. Sheeja D., Tay B.K., Yu L.J., Lau S.P., Sze J.Y., and Cheong C.K. Effect of frequency and pulse width on the properties of ta:C films prepared by FCVA together with substrate pulse biasing. Thin Solid Films 420-421 (2002) 62-69
8. Xu J., Fan H., Kousaka H., Umehara N., Diao D., and Liu W. Growth and properties of hydrogen-free DLC films deposited by surface-wave-sustained plasma. Diam. Relat. Mater. 16 (2007) 161-166
9. Takikawa H., Izumi K., Miyano R., and Sakakibara T. DLC thin film preparation by cathodic arc deposition with a super droplet-free system. Surf. Coat. Technol. 163-164 (2003) 368-373
10. Miyakawa N., Minamisawa S., Takikawa H., and Sakakibara T. Physical-chemical hybrid deposition of DLC film on rubber by T-shape filtered-arc-deposition. Vacuum 73 (2004) 611-617
11. Takikawa H., Miyakawa N., Minamisawa S., and Sakakibara T. Fabrication of diamond-like carbon film on rubber by T-shape filtered-arc-deposition under the influence of various ambient gases. Thin Solid Films 457 (2004) 143-150
12. Kamiya M., Tanoue H., Takikawa H., Taki M., Hasegawa Y., and Kumagai M. Preparation of various DLC films by T-shape filtered arc deposition and the effect of heat treatment on film properties. Vacuum 83 (2008) 510-514
13. In: Harrison G.R. (Ed). Table of Wavelength (1969), The MIT Press, London
14. W.L. Wiese, M.W. Smith, B.M. Miles (Eds.), Atomic Transition Probabilities NSRDS-NBS, Washington, DC, 1969.
15. In: Rosen B. (Ed). International Tables on Selected Constants 17 Spectroscopic Data Relative to Diatomic Molecules (1970), Oxford Pergamon Press, Oxford
16. In: Pearse R.W.B., and Gaydon A.G. (Eds). The Identification of Molecular Spectra (1976), Chapman & Hall, London
17. 2 fixation in a vacuum arc deposition apparatus for producing TiN film. Trans. IEE Jpn. 116-A (1996) 424-428 [in Japanese]