EHD micro pump using pyrolyzed polymer 3-D carbon mesh electrodes

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2009, Pages 499-502

  Wakui, Daisuke ^a   Imai, Naoki ^a   Nagaura, Yasuhiro ^a   Sato, Hironobu ^a   Sekiguchi, Tetsushi ^a   Konishi, Satoshi ^b   Sholil, Shuichi ^a   Homma, Takayuki ^a  

^a WASEDA UNIVERSITY   (Japan)

^b RITSUMEIKAN UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

APPLIED VOLTAGES; BONDING METHODS; CARBON ELECTRODE; CARBON STRUCTURES; FLUORINERT; LOW TEMPERATURES; MAXIMUM PRESSURE; MESH ELECTRODES; MICRO MESH; MICRO PUMP; PYROLYZED POLYMERS; SAMPLE SOLUTION; VOLUME FLOW RATE; WAFER LEVEL;

ELECTROHYDRODYNAMICS; FLUID DYNAMICS; IMAGE SENSORS; PUMPS; THREE DIMENSIONAL; WAFER BONDING;

ELECTRODES;

EID: 65949113622     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2009.4805428     Document Type: Conference Paper

References (12)

1. Kensaku Yamamoto, Keisuke Naka, Yasuhiro Nagaura, Hironobu Sato,Shuichi Shoji and Satoshi Konishi, "Pyrolyzed Polymer Mesh Electrode Integrated Into Fluidic Channel For Gate Type Sensor" the International Conference on Micro ElectroMechanical Systems 2007, 2007, pp. 271-274
2. A. Richter and H. Sandmaier, "An EHD pump", the International Conference on Micro ElectroMechanical Systems 1990, 1990, pp.99-104
3. S. Ahn and Y. Kim, "Fabrication and experiment of a planar micro ion drag pump", Sensors and Actuators A, 1998, Vol 70 (1-2), pp.1-5 (Pubitemid 128399806)
4. Yang, L. J.,Wang, J. M. and Huang, Y. L., "The Micro Ion Drag Pump Using Indium-Tin-Oxide (ITO) Electrodesto Resist Aging," Proc. IEEE MEMS'03, PP. 112-115 (2003),
5. or Sensors and Actuators A, Vol. 111, 2004,pp.118-122
6. Jiun-Min Wang and Lung-Jieh Yang, "Electro-Hydro-Dynamic (EHD) Micropumps with electrode Protection by Parylene and Gelatin", Tamkang Journal of Science and Engineering, 2005 Vol.8, NO.3, pp.231-236
7. K. Naka and S. Konishi, "Micro and Nano Structures of Carbonized Polymer through Pyrolytic Transform from Polymer Structure", IEE Micro and Nano Letters, pp. 79-82
8. K.Naka, H.Hayashi, M.Senda, H Shiraishi and S. Konishi, "Eefect OF NANO STRIPE CARBONIZED-POLYMER ELECTRODE ON HIGH S/N RATIO IN ELECTRO CHEMICAL DETECTION", the International Conference on Micro Electro Mechanical Systems 2007, 2007, pp.195-198
9. K. Naka, T. Hashishin, J. Tamaki and S. Konishi, "PYROLYZED POLYMER AS ABSORBENT OF NITROGENDIOXIDE SENSOR", the International Conference on Micro Electro Mechanical Systems, 2006, pp. 518-521 (Pubitemid 44592344)
10. R. Yokokawa, K. Yamamoto, S. Aoki, K. Naka and S. Konishi, "Characterization of Patterned Pyrolyzed Polymer for glucose sensor", Asia-Pacific Conference of Transducers and Micro-Nano Technology, 2006, pp. 287-290
11. H.Sato, T.Kakinuma, J.S.Go, S.Shoji, "In-channel 3-D micromesh structures using maskless multi-angle exposure and their microfilter application", Sensors & Actuators A, Vol. 111, 2004, pp87-92
12. H.Sato, H.Matsumura, S.Keino, S.Shoji, "An all SU-8 Microfluidic Chip with Built-in 3-D Fine Microstructures", Journal of Micromechanics and Microengineering, 16, 2006, pp.2318-2322. (Pubitemid 44679451)