The micro ion drag pump using indium-tin-oxide (ITO) electrodes

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2003, Pages 112-115

  Yang, Lung Jieh ^a   Wang, Jiun Min ^a   Huang, Yu Lin ^a  

^a TAMKANG UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

BONDING; DIFFUSION; ELECTRODES; ELECTROHYDRODYNAMICS; ETHANOL; FLOW OF FLUIDS; GLASS; INDIUM COMPOUNDS; PUMPS; SILICON; SUBSTRATES;

ANODIC BONDING; ELECTROHYDRODYNAMIC MICRO PUMP; INDIUM TIN OXIDE; MICRO ION DRAG PUMP; PUMPING EFFICIENCY;

MICROELECTROMECHANICAL DEVICES;

EID: 0038494590     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)

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7. J.-W. Choi, "An active micro mixer using EHD convection", Solid-State Sensor and Actuator Workshop, Hilton Head, 2000, pp.52-55.