Monolithically integrated piezomems SP2T switch and contour-mode filters

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2009, Pages 900-903

  Pulskamp, J S ^a   Judy, D C ^a   Polcawich, R G ^a   Kaul, R ^a   Chandrahalim, H ^b   Bhave, S A ^b  

^a U S ARMY RESEARCH LABORATORY   (United States)

^b Department of Obstetrics Gynecology   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHANNEL SELECTIVITY; CONTOUR MODE; DEVICE FABRICATIONS; DEVICE TECHNOLOGIES; FILTER ARRAYS; HYBRID FABRICATION; KEY COMPONENT; LEAD ZIRCONATE TITANATE THIN FILMS; LOW-VOLTAGE; MODE FILTERS; MONOLITHICALLY INTEGRATED; PIEZOELECTRIC MEMS; PZT; PZT ACTUATOR; RF SWITCH; SILICON RESONATORS; SILICON-ON-INSULATOR; SWITCH OPERATION; SWITCHABLE; TUNABILITY; UNIFIED PROCESS; VOLTAGE-TUNABLE; WIDE-BAND;

ELECTRIC CONVERTERS; MEMS; MICROELECTROMECHANICAL DEVICES; MONOLITHIC INTEGRATED CIRCUITS; PIEZOELECTRIC ACTUATORS; PIEZOELECTRIC MATERIALS; PIEZOELECTRIC TRANSDUCERS; SWITCHES;

SEMICONDUCTING LEAD COMPOUNDS;

EID: 65949113163     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2009.4805529     Document Type: Conference Paper

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