Microfluidics within a swagelok®: A MEMS-on-tube assembly

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2009, Pages 324-327

  Unnikrishnan, S ^a   Jansen, H V ^a   Berenschot, J W ^a   Mogulkoc, B ^a   Elwenspoek, M C ^a  

^a UNIVERSITY OF TWENTE   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

CONVENTIONAL APPROACH; FABRICATION PROCESS; GLASS TUBES; MEMSDEVICES; MICRO-FLUIDIC DEVICES; MICROFLUIDIC COMPONENTS;

CHIP SCALE PACKAGES; GLASS; MICROELECTROMECHANICAL DEVICES; MICROFLUIDICS; SUBSTRATES;

MEMS;

EID: 65949100417     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2009.4805384     Document Type: Conference Paper

References (9)

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