A micromachined quartz and steel pressure sensor operating upto 1000°c and 2000 TORR

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2009, Pages 841-844

  Wright, Scott A ^a   Gianchandani, Yogesh B ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BULK METALS; CURRENT DISTRIBUTION; DYNAMIC RANGE; ELECTRODE DIAMETERS; HIGH TEMPERATURE; INTER-ELECTRODE SPACING; MICRODISCHARGE; MICRODISCHARGES; MICROMACHINED; PULSED DC; QUARTZ SUBSTRATE; TEMPERATURE COEFFICIENT;

DC-DC CONVERTERS; ELECTRODES; HIGH PERFORMANCE LIQUID CHROMATOGRAPHY; HIGH TEMPERATURE OPERATIONS; OXIDE MINERALS; PRESSURE SENSORS; PRESSURE TRANSDUCERS; QUARTZ;

SUBSTRATES;

EID: 65949085597     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2009.4805514     Document Type: Conference Paper

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