Microdischarge-based pressure sensors for operation at 1000ºc

Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop

Volumn , Issue , 2008, Pages 332-335

  Wright, Scott A ^a   Gianchandani, Yogesh B ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; ELECTRODES; HIGH TEMPERATURE OPERATIONS; MICROSYSTEMS; PRESSURE SENSORS; SUBSTRATES;

CURRENT DISTRIBUTION; HIGH TEMPERATURE; MAXIMUM SENSITIVITY; MICRODISCHARGES; PRESSURE RANGES; QUARTZ SUBSTRATE; SENSOR STRUCTURES; TEMPERATURE COEFFICIENT;

SOLID-STATE SENSORS;

EID: 65949103563     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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