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Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7274, Issue , 2009, Pages

Alternative optical technologies - More than curiosities?

a Rochester Institute of Technology (United States)

Author keywords

Evanescent wave lithography; Interferometric lithography; Metamaterials; Nanolithography; Plasmonic lithography; Solid immersion lithography; StED lithography; Superlenses

Indexed keywords

EVANESCENT WAVE LITHOGRAPHY; INTERFEROMETRIC LITHOGRAPHY; PLASMONIC LITHOGRAPHY; SOLID IMMERSION LITHOGRAPHY; STED LITHOGRAPHY; SUPERLENSES;

ELECTROMAGNETIC WAVE REFLECTION; INTERFEROMETRY; METAMATERIALS; NANOLITHOGRAPHY; OPTICAL INSTRUMENTS; SURFACE PLASMON RESONANCE;

PHOTOLITHOGRAPHY;

EID: 65849370639 PISSN: 0277786X EISSN: None Source Type: Conference Proceeding
DOI: 10.1117/12.817219 Document Type: Conference Paper

Times cited : (5)

References (14)

1
- 0004001868
- SPIE Press
- G. Reynolds, J. DeVelis, G. Parrent, B. Thompson, The New Physical Optics Notebook: Tutorials in Fourier Optics, SPIE Press (1989).
- (1989) The New Physical Optics Notebook: Tutorials in Fourier Optics
- Reynolds, G.¹ Develis, J.² Parrent, G.³ Thompson, B.⁴

2
- 25344461837
- F. De Martini, P. Ristori, E. Santamato, A.C.A. Zammit, Phys. Rev., B23, 3797 (1981).
- (1981) Phys. Rev. , vol.B23 , pp. 3797
- De Martini, F.¹ Ristori, P.² Santamato, E.³ Zammit, A.C.A.⁴

3
- 3042799702
- W. Srituravanich, N. Fang, C. Sun, Q. Luo, Z. Zhang, Nano Lett., 4, 1085-1088 (2004).
- (2004) Nano Lett. , vol.4 , pp. 1085-1088
- Srituravanich, W.¹ Fang, N.² Sun, C.³ Luo, Q.⁴ Zhang, Z.⁵

4
- 65849146697
- 12 October 2008
- W. Srituravanich, L. Pan, Y. Wang, C. Sun, D.B. Bogy, Z. Zhang, Nature NanoTech, 12 October 2008, 1 (2008).
- (2008) Nature NanoTech , pp. 1
- Srituravanich, W.¹ Pan, L.² Wang, Y.³ Sun, C.⁴ Bogy, D.B.⁵ Zhang, Z.⁶

5
- 33745794874
- B.W. Smith, Y. Fan, J. Zhou, N.Lafferty, A.Estroff, Proc. SPIE Optical Microlithography XIX, 6154, (2006).
- (2006) Proc. SPIE Optical Microlithography XIX , vol.6154
- Smith, B.W.¹ Fan, Y.² Zhou, J.³ Lafferty, N.⁴ Estroff, A.⁵

6
- 4644263494
- H.J. Lezec, T. Thio, Optics Express, 12(16), 3629-3651, (2004).
- (2004) Optics Express , vol.12 , Issue.16 , pp. 3629-3651
- Lezec, H.J.¹ Thio, T.²

7
- 57249086350
- N. Lafferty, A. Bourov, A. Estroff, B.W. Smith, RIT, J. Vac. Sci. Technol. B 26(6), 2192 (2008).
- (2008) RIT, J. Vac. Sci. Technol. B , vol.26 , Issue.6 , pp. 2192
- Lafferty, N.¹ Bourov, A.² Estroff, A.³ Smith, B.W.⁴

8
- 17644419669
- N. Fang, H. Lee, C. Sun, X. Zhang, Science 22, Vol.308(5721), (2005).
- (2005) Science 22 , vol.308 , Issue.5721
- Fang, N.¹ Lee, H.² Sun, C.³ Zhang, X.⁴

9
- 0020587712
- B. Griffing, P. West, IEEE Elect. Dev . Lett, 4(1), 14-16, (1983).
- (1983) IEEE Elect. Dev. Lett , vol.4 , Issue.1 , pp. 14-16
- Griffing, B.¹ West, P.²

10
- 65849180301
- S.W. Hell, J. Wichman, Opt. Lett. 19 (1994).
- (1994) Opt. Lett. , vol.19
- Hell, S.W.¹ Wichman, J.²

11
- 65849331458
- S.W. Hell, M. Kroug, Appl. Phy. B 60 (1995).
- (1995) Appl. Phy. B , vol.60
- Hell, S.W.¹ Kroug, M.²

12
- 65849158841
- S.W. Hell, Phys. Lett A 326 (2004).
- (2004) Phys. Lett A , vol.326
- Hell, S.W.¹

13
- 65849516432
- B. W. Smith, Y. Fan, M. Slocum, L. Zavyalova, Proc. SPIE Optical Microlithography, vol.5754, 2005.
- (2005) Proc. SPIE Optical Microlithography , vol.5754
- Smith, B.W.¹ Fan, Y.² Slocum, M.³ Zavyalova, L.⁴

14
- 0013457134
- B. Tyrell, M. Fritze, D. Astolfi, R. Mallen, B. Wheeler, P. Rhyins, P. Martin, J., J. Micro/Nanolith., MEMS, and MOEMS, 1(3), 243 (2002).
- (2002) J. Micro/Nanolith., MEMS, and MOEMS , vol.1 , Issue.3 , pp. 243
- Tyrell, B.¹ Fritze, M.² Astolfi, D.³ Mallen, R.⁴ Wheeler, B.⁵ Rhyins, P.⁶ Martin, P.J.⁷

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